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(a) Self-aligned double patterning (SADP) proce...

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Figure 5 from Optimization of SADP Process for ...

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(a) Self-aligned double patterning (SADP) proce...

(a) The scheme of SADP based on 193 nm immersio...

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(a) BF image, (b) the corresponding SADP and (c...

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Figure 2 from Optimization of SADP Process for ...

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Demonstration result of SADP with EUV lithograp...

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Demonstration result of SADP with EUV lithograp...

(a) The scheme of SADP based on 193 nm immersio...

Lithography challenges threaten the cost benefi...

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Figure 4 from Optimization of SADP Process for ...

(a) The scheme of SADP based on 193 nm immersio...

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SADP | Calibration | Chemistry